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INTRODUCTION TO MICROELECTROMECHANICAL SYSTEMS

ECE 542
课程描述

Introduction to MEMS technology, devices and systems. Fundamentals of MEMS in fabrication, process integration, material mechanics of MEMS structures, sensors and actuators. Main topics in MEMS - microfluidics, optical MEMS, RF MEMS, BioMEMS, packaging, and CAD.

先修课程

(ECE 335 or ECE 340 ), graduate/professional standing, or member of Engineering Guest Students

满足要求

This course does not satisfy any prerequisites.

学分

未报告

开课时间

未报告

平均绩点
3.67

-0.15% 相比历史数据

完成率
100%

0.83% 相比历史数据

A率
50%

-17.57% 相比历史数据

班级规模
24

57.38% 相比历史数据

Cumulative Grade Distribution

教师 (2026 Summr)

按评分排序,数据来自 Rate My Professors

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