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PLASMA PROCESSING AND TECHNOLOGY

ECE/NE 528
Course Description

Introduction to basic understanding and techniques. Plasma processing of materials for semiconductors, polymers, plasma spray coatings, ion implantation, etching, arcs, extractive metallurgy and welding. Plasma and materials diagnostics.

Prerequisites

PHYSICS 322 or ECE 320 , graduate/professional standing, or member of Engineering Guest Students

Satisfies

This course does not satisfy any prerequisites.

Credits

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Offered

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Grade Point Average
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A Rate
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Class Size
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-100% from Historical

Cumulative Grade Distribution

Instructors (2026 Summr)

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